ENG PHYS *720 / Advanced Modeling of Semiconductor Device Fabrication

3 unit(s)

A. Knights

This course will explore the physics and technology under-pinning the global semiconductor fabrication industry. The design of processes for nano-, micro- and opto-electronic devices will be covered with description of the fundamental models describing diffusion, ion implantation, polymer processing, thin film deposition and thin film growth. Students will be required to develop models from first principal, as well as design novel process strategies using the industrial compatible software ‘Athena.’ Emphasis on industrial practice will be made with description of six-sigma process development.