ENG PHYS 719 / MEMS Devices: Design, Fabrication, and Applications

3 unit(s)

R.N.Kleiman (cross-listed as MECH ENG 719)

An introductory course that will provide the fundamentals from many disciplines relevant to the understanding and application of MicroElectroMechanical Systems (MEMS) technology. Design topics will include mechanical and biofluidic principles with an emphasis on analytical techniques. Equivalent circuits for MEMS devices, noise analysis, and nonlinear phenomena will be discussed. Fabrication methods will cover bulk and surface micromachining techniques that rely heavily on VLSI processing. Process integration with existing device platforms and materials properties related to MEMS design and fabrication will be discussed. Numerous applications of MEMS technology to problems in science, engineering, and medicine will be presented and analysed.