Jan 28, 2025  
School of Graduate Studies Calendar, 2021-2022 
    
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School of Graduate Studies Calendar, 2021-2022 [-ARCHIVED CALENDAR-]

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ENG PHYS 752 / Advanced MEMS Fabrication and Microfluidics

3 unit(s)

P. Selvaganapathy (cross-listed as MECH ENG 752 )

Introduction, Micorfabrication and micromachining. Surface and bulk micromachining, nonconventional machining. Microfluidics, Microchannels, Microsvalves, Micromixers, Micropumps, Droplet actuation, Integrated Systems.


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