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Sep 07, 2024
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MECHENG 4E03 - Microelectromechanical Systems (MEMS) 3 unit(s)
Introduction, microfabrication and micromachining fundamentals, scaling effects, mechanics and transduction at microscale, actuation and sensing methods - Electrostatic, piezoelectric, thermal, electromagnetic, resonant, tunneling and microfluidic techniques. Capacitative sensors, resonators, lab on chip devices, microfluidic devices, micromirrors, assembly techniques for MEMS, microsystem packaging.
Three lectures; second term
Prerequisite(s): Registration in Level IV or above of any Mechanical Engineering, Engineering Physics or Integrated Biomedical Engineering and Health Sciences (IBEHS) program or permission of the Department
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