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Jun 09, 2026
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ENGPHYS 4Z04 - Semiconductor Manufacturing Technology 4 unit(s)
Detailed description of fabrication technologies used in the semiconductor industry; computer modelling of device fabrication process and device performance; device fabrication in a cleanroom environment. Three lectures, one lab (three hours); fall term Prerequisite(s): One of ENGPHYS 3PN3, 3PN4, 3SM3, or MATLS 3Q03 Antirequisite(s): ENGPHYS 4Z03
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