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Jan 15, 2025
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CHEM ENG 750 / Advanced MEMS Fabrication and Microfluidics 3 unit(s)
R. Selvaganapathy (cross-listed as MECH ENG 752 and ENG PHYS 752 )
Introduction, Microfabrication and micromachining, Surface and bulk micromachining, nonconventional machining, Microfluidics, Microchannels, Microvalves, Micromixers, Micropumps, Droplet actuation, Integrated Systems.
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